Abstract: This article reports for the first time a stiffness-adjustable resonant accelerometer using the distributed electrostatic drive scheme, which has great potential in realizing high-frequency ...
Abstract: We present a piezoresistive high-G accelerometer that achieves 1% cross-axis sensitivity, 200 kG shock endurance, and 90% fabrication yield. The special features and advances in the ...
Some results have been hidden because they may be inaccessible to you
Show inaccessible results